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OPERATION GUIDE SYSTEM FOR X-RAY ANALYSIS, OPERATION GUIDE METHOD THEREFOR, AND OPERATION GUIDE PROGRAM THEREFOR

机译:操作指南系统,用于X射线分析,操作指南方法,以及操作指南

摘要

Provided are operation guide system for X-ray analysis to enable users to easily understand measurement of X-ray optical system to be selected. The operation guide system includes:measurement information acquisition unit for acquiring information on a sample and each X-ray measurement optical system part; sample magnification acquisition unit for acquiring magnification for display; incident X-ray shape deformation unit for determining distorted shape of an incident X-ray obtained by magnifying shape of the incident X-ray based on the magnification in a plane perpendicular to an optical axis direction; scattered X-ray shape deformation unit for determining distorted shape of a scattered X-ray obtained by magnifying shape of the scattered X-ray based on the magnification in the plane; and X-ray measurement optical system modeling unit for modeling a deformed shape of the sample, the distorted shape of the incident X-ray, and the distorted shape of the scattered X-ray.
机译:提供了用于X射线分析的操作指导系统,使用户能够容易地理解要选择的X射线光学系统的测量。操作指南系统包括:测量信息采集单元获取关于样品和每个X射线测量光学系统部件的信息;采样倍率采集单元获取显示倍率;入射X射线形状变形单元,用于确定通过基于垂直于光轴方向的平面中的倍率而通过放大入射X射线的形状而产生的入射X射线的变形形状;散射的X射线形状变形单元,用于确定通过基于平面缩放的倍率而通过放大散射X射线的形状而获得的散射X射线的变形形状;和X射线测量光学系统建模单元,用于建模样品的变形形状,入射X射线的扭曲形状,以及散射X射线的扭曲形状。

著录项

  • 公开/公告号EP3246696B1

    专利类型

  • 公开/公告日2021-06-23

    原文格式PDF

  • 申请/专利权人

    申请/专利号EP20170000816

  • 发明设计人 HIMEDA AKIHIRO;

    申请日2017-05-11

  • 分类号G01N23/20016;G01N23/20;G01N23/207;

  • 国家 EP

  • 入库时间 2022-08-24 19:30:26

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