POLYIMIDE-BASED HUMIDITY SENSOR AND PREPARATION METHOD THEREFOR

摘要

A polyimide-based humidity sensor and a preparation method therefor. The humidity sensor comprises a substrate (1), a first oxide layer (2), a lower electrode (3), a second oxide layer (4), a dielectric layer (5), and an upper electrode (6), wherein the dielectric layer (5) is made of a polyimide nanofiber. The polyimide-based humidity sensor has the characteristics of high in detection precision and small in device size.