METHOD AND OPTICAL SYSTEM FOR A LASER BEAM MODIFICATION OF A MATERIAL WHICH IS AT LEAST LARGELY TRANSPARENT TO THE LASER BEAM

摘要

The invention relates to a method for a laser beam modification of a material (5) which is at least largely transparent to the laser beam (3), wherein a focal zone, which is elongated in the direction of propagation of the beam, of an individual pulse of the laser beam (3) is brought into interaction with the material (5), and a channel (17) which passes through the material (5) from a first end face (13) to a second end face (15) is produced as a result of the interaction between the individual pulse and the material (5), said channel having a width dimension of maximally 10 µm and in particular maximally 1 µm.