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MEASUREMENT RECIPE OPTIMIZATION BASED ON PROBABILISTIC DOMAIN KNOWLEDGE AND PHYSICAL REALIZATION
MEASUREMENT RECIPE OPTIMIZATION BASED ON PROBABILISTIC DOMAIN KNOWLEDGE AND PHYSICAL REALIZATION
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机译:基于概率域知识和物理实现的测量配方优化
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摘要
Methods and systems for training and implementing metrology recipes based on performance metrics are employed to quantitatively characterize the measurement performance of a metrology system in a particular measurement application. Performance metrics are employed to regularize the optimization process employed during measurement model training, model-based regression, or both.
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