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FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT

机译:通过激光频移的快速相移干涉测量法

摘要

An acousto-optic modulator (AOM) laser frequency shifter system includes a laser configured to generate an incident beam, a first optical splitter optically coupled to the laser and configured to split the incident beam into at least one portion of the incident beam, at least one phase-shift channel optically coupled to the first optical splitter and configured to generate at least one frequency-shifted beam with an acousto-optic modulator (AOM) from the at least one portion of the incident beam received from the first optical splitter, and a second optical splitter configured to receive the at least one frequency-shifted beam from the at least one phase-shift channel and configured to direct the at least one frequency-shifted beam to an interferometer configured to acquire an interferogram of a sample with the at least one frequency-shifted beam.
机译:声光调制器(AOM)激光频率变速器系统包括被配置为产生入射光束的激光器,第一光学分路器光学耦合到激光器,并且被配置为至少将入射光束分成入射光束的至少一部分。一个相移通道光学耦合到第一光学分路器,并且被配置为从从第一光学分路器接收的入射光束的至少一部分产生至少一个具有声光调制器(AOM)的频移光束,并且第二光学分路器被配置为从至少一个相移通道接收至少一个频移光束,并且被配置为将至少一个频移光束引导到干涉仪,该干涉仪被配置为使用AT获取样本的干扰图至少一个频移波束。

著录项

  • 公开/公告号WO2021101819A1

    专利类型

  • 公开/公告日2021-05-27

    原文格式PDF

  • 申请/专利权人 KLA CORPORATION;

    申请/专利号WO2020US60643

  • 发明设计人 HUANG HAIFENG;SHI RUI-FANG;WACK DANIEL C.;

    申请日2020-11-16

  • 分类号H01S3/106;H01S3/10;

  • 国家 US

  • 入库时间 2022-08-24 19:01:19

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