Sixth order corrective stem multipole corrector

摘要

Problem to be solved: to provide a technique for correcting an axial aberration of a particle optical lens in a charged particle microscope system.The multipolar corrector 100 includes a first primary polygonal pole 102 that generates a first primary polygonal field when the first excitation is applied, and a second primary polarizer 104 that generates a second primary polygonal field when the second excitation is applied.The second primary polygonal pole 104 is disposed between the first primary polygonal pole 102 and the lens which is the source of spherical aberration, and includes a secondary polygonal 112 for correcting the fourth order and sixth order aberrations generated by the first primary polygonal pole 102.Further, the third order polypoles 114 for correcting the eighth order aberration are included.Diagram