INSENTEMPERATOR MEASUREMENT AND LATER ORGANISATION

摘要

Internal temperature measuring device measuring the internal temperature of a measuring object, comprising the internal temperature measuring device (1):-a sensor housing (10),where a MEMS chip (20, 20a) and a temperature sensor (26) are located in a tube-shaped housing with a floor (11), with the MEMS chip (20, 20a) comprising one or more thermal columns (24a, 24b) each measuring a heat flow, which passes through a floor area of the tube-shaped housing (11) with the temperature sensor (26) measuring a reference temperature used as the temperature of a predetermined area of the MEMS chip (20, 20a); anda printed circuit (30) which is configured to calculate the internal temperature of the measuring object based on the output of one or more thermal columns (24a, 24b) of the sensor housing (10), where an outer surface of the sensor housing (10) is obtained from a plate area of the printed circuit (30) by means of a passage opening present in the printed circuit (30).