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Reaction of diazadiene complexes with amines
Reaction of diazadiene complexes with amines
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机译:二氮烯配合物与胺的反应
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摘要
A method of forming a thin film on a substrate which includes a step of reacting a precursor compound with a Lewis base. The precursor compound has a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided.
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