Scanning transmission electron microscope observation method, scanning transmission electron microscope system and program

摘要

Problem to be solved: To observe the atoms in the sample with high contrast using a split type detector having a plurality of detection regions.Scanning transmission electron microscope system 100Electron beam EB scanned on sample sUsing a split type detector 105 having a plurality of detection regions disposed in the bright field regionThe electrons scattered through the sample s are detected for each detection region.A plurality of divided images are generated based on the respective detection results in a plurality of detection regions.For multiple split imagesThe filter is generated based on the signal noise ratio to generate a reconstructed image.The signal noise ratio is proportional to the normalized value of the total phase contrast transfer function obtained by the sum of product calculation of the phase contrast transfer function of the complex number corresponding to the plurality of detection regions and the weighting factor, and the filter is Based on the weighting factor to which the signal noise ratio becomes maximum.Diagram