首页> 外国专利> Manufacturing method of sensor for detecting hydrogen peroxide and sensor for detecting hydrogen peroxide manufactured by the same

Manufacturing method of sensor for detecting hydrogen peroxide and sensor for detecting hydrogen peroxide manufactured by the same

机译:用于检测过氧化氢和传感器的传感器的制造方法,用于检测相同的过氧化氢

摘要

The present invention comprises the steps of (1) preparing a substrate; (2) forming a gas sensing unit including carbon nanotubes and porphyrin nanofibers on a substrate; And (3) forming an electrode on the substrate on which the gas sensing unit is formed; and a method of manufacturing a sensor for detecting hydrogen peroxide, and a sensor for detecting hydrogen peroxide manufactured by the method. According to the manufacturing method of the present invention, it is possible to provide a semiconductor-type sensor capable of detecting a sub-ppm level of hydrogen peroxide vapor by including the step of forming a gas sensing unit including carbon nanotubes and porphyrin nanofibers. .
机译:本发明包括(1)的步骤制备基材; (2)在基材上形成包括碳纳米管和卟啉纳米纤维的气体传感单元; (3)在形成气体传感单元的基板上形成电极;以及制造用于检测过氧化氢的传感器的方法,以及用于检测通过该方法制造的过氧化氢的传感器。根据本发明的制造方法,通过包括形成包括碳纳米管和卟啉纳米纤维的气体传感单元的步骤,可以提供能够检测过氧化氢蒸汽的亚ppm水平的半导体型传感器。 。

著录项

  • 公开/公告号KR102251100B1

    专利类型

  • 公开/公告日2021-05-13

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020190075361

  • 发明设计人 변영태;이재성;정다운;

    申请日2019-06-25

  • 分类号G01N27/12;G01N27/327;G01N33;B82Y30;

  • 国家 KR

  • 入库时间 2024-06-14 21:34:13

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号