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Manufacturing method of sensor for detecting hydrogen peroxide and sensor for detecting hydrogen peroxide manufactured by the same
Manufacturing method of sensor for detecting hydrogen peroxide and sensor for detecting hydrogen peroxide manufactured by the same
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机译:用于检测过氧化氢和传感器的传感器的制造方法,用于检测相同的过氧化氢
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摘要
The present invention comprises the steps of (1) preparing a substrate; (2) forming a gas sensing unit including carbon nanotubes and porphyrin nanofibers on a substrate; And (3) forming an electrode on the substrate on which the gas sensing unit is formed; and a method of manufacturing a sensor for detecting hydrogen peroxide, and a sensor for detecting hydrogen peroxide manufactured by the method. According to the manufacturing method of the present invention, it is possible to provide a semiconductor-type sensor capable of detecting a sub-ppm level of hydrogen peroxide vapor by including the step of forming a gas sensing unit including carbon nanotubes and porphyrin nanofibers. .
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