Systems, methods and computer program products for automatically generating wafer image-to-design coordinate mapping

摘要

Systems, methods and computer program products are provided for automatically generating wafer image-to-design coordinate mappings. In use, the design of the wafer is received by a computer processor. In addition, the image of the wafer produced from the design is received by the computer processor. In addition, the coordinate mapping between the design and the image is automatically generated by the computer processor.