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NONLINEAR ERROR CORRECTION METHOD FOR OPTICAL FIBER MICHELSON INTERFEROMETER

机译:光纤迈克尔森干涉仪的非线性误差校正方法

摘要

A nonlinear error correction method for an optical fiber Michelson interferometer, relating to the technical field of optical fiber interferometry. In the present invention, without needing to change the positions of a first reflector and a second reflector, wavelength pre-scanning is performed on a laser wavelength modulated light source; a continuous variation in the optical path difference between a reference beam and a measurement beam of the interferometer is generated using the continuous output laser wavelength variation to generate at least one cycle of phase change in an interference signal obtained by a detector, so as to implement the pre-extraction of characteristic parameters of the interference signal; and the pre-extracted characteristic parameters are used to implement the nonlinear error correction and carry out a high-precision displacement measurement during the measurement process. The present invention achieves the pre-extraction of the characteristic parameters of the interference signal of the optical fiber Michelson interferometer, can effectively solve the problem of nonlinear error correction in the interferometry, especially in the measurement of small displacement, and has significant technical advantages in the field of precision measurement.
机译:光纤迈克森干涉仪的非线性误差校正方法,与光纤干涉法技术领域有关。在本发明中,不需要改变第一反射器和第二反射器的位置,在激光波长调制光源上执行波长预扫描;使用连续输出激光波长变化产生参考光束和干涉仪的测量光束之间的光路径的连续变化,以在由检测器获得的干扰信号中产生至少一个相变循环的相变循环,以实现干扰信号的特征参数的预提取;并且预先提取的特征参数用于实现非线性误差校正,并在测量过程中执行高精度位移测量。本发明实现了光纤迈克森干涉仪的干扰信号的特征参数的预提取,可以有效地解决干涉测量中的非线性误差校正的问题,尤其是在小位移的测量中,具有显着的技术优势精密测量领域。

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