A HEATING STRUCTURE CONFIGURED TO IMPROVE HEAT EFFICIENCY IN A MODULATOR DEVICE

摘要

Various embodiments of this disclosure are directed to a modulator device that includes a first waveguide and a heater structure. An input terminal is configured to receive incident light. The first waveguide has a first input region and a first output region coupled to the input terminal. A second waveguide is optically coupled to the first waveguide. The second waveguide has a second input region and a second output region coupled to the input terminal. An output terminal is configured to provide outgoing light that is modulated based on the incoming light. The output terminal is coupled to the first output region and the second output region. The heating structure lies over the first waveguide. A lower surface of the heater structure is aligned with a lower surface of the first waveguide. The first waveguide has a lateral spacing between side walls of the heating structure.