Method of Manufacturing Planar Multi-electrode Array Using Laser Patterning and Photosensitive Polymer Insulating Film

摘要

A method of manufacturing a planar multi-electrode array using laser patterning and a photosensitive polymer insulating film according to an embodiment of the present invention includes: performing a conductor patterning process using a laser on a first substrate on which a conductor is deposited; Performing an insulation process by a photolithography process using an insulation material on the conductor patterned first substrate; And electrodepositing a platinum black solution or an iridium oxide solution to a plurality of recording electrodes and reference electrodes with open sites.