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NON-DESTRUCTIVE BOND LINE THICKNESS MEASUREMENT OF THERMAL INTERFACE MATERIAL ON SILICON PACKAGES

机译:硅包装上的热界面材料的非破坏性粘合线厚度测量

摘要

Aspects of the invention include a non-destructive bond line thickness measurement of thermal interface material on silicon packages. A non-limiting example computer-implemented method includes receiving a chip mounted on a laminate and depositing a high-density material on the chip. The computer-implemented method deposits a thermal interface material on the chip and lids the chip, and the laminate with a lid. The computer-implemented method X-rays the lid, the chip, and the laminate to produce an X-ray and measures, using a processor, from the X-ray a bond line thickness of the TIM as a distance from a bottom of the lid to a top surface of the high-density material.
机译:本发明的各方面包括硅包装上的热界面材料的非破坏性粘合线厚度测量。非限制性示例计算机实现的方法包括接收安装在层压板上的芯片并在芯片上沉积高密度材料。计算机实现的方法将热界面材料沉积在芯片上并盖上芯片,并用盖子盖板。计算机实现的方法X射线盖子,芯片和层压板以使用处理器产生X射线并测量,从X射线到距离底部的距离盖到高密度材料的顶表面。

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