PIXEL DEFINITION IN A POROUS SILICON QUANTUM DOT RADIATION DETECTOR

摘要

An imaging module (114) of an imaging system comprises a porous silicon membrane (116) with a first side (208), a contact side (210) opposite the first side, columns of silicon (212) configured to extend from the first side to the contact side, and columnar holes (214, 502) interlaced with the columns of silicon and configured to extend from the first side to the contact side. The imaging module further includes quantum dots (118) in the columnar holes. The imaging module further includes a metal pad (120) electrically coupled to the columns of silicon of the porous silicon membrane. The quantum dots in the columnar holes are electrically insulated from the metal pad. The imaging module further includes a substrate (122) with an electrically conductive pad (204) in electrical communication with the metal pad that defines a pixel.