METHOD FOR MANUFACTURING THREE-DIMENSIONALLY STRUCTURED MEMBER, METHOD FOR MANUFACTURING ACCELERATION PICKUP, ACCELERATION PICKUP, AND ACCELERATION SENSOR

摘要

The purpose of the present invention is to provide a method for manufacturing a three-dimensionally structured member which can be made by a simpler process. The method for manufacturing a three-dimensionally structured member includes shaping a flat plate-shaped base member 10A to produce a three-dimensionally structured member having a plurality of sections 11 to 14 that are different from one another in thickness. The manufacturing method comprises: a mask formation step for forming a mask 30 over the whole of at least one main surface of the base member 10A; a mask removal step for removing a part of the mask 30; and an etching step for etching an exposed part of the base member 10A, wherein a combination of the mask removal step and the etching step is performed on the mask 30 and the base member 10A that correspond to each of the plurality of sections 11 to 14 of the three-dimensionally structured member, in the order from thinnest to the thickest of thicknesses of the three-dimensionally structured members.