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METHOD AND APPARATUS FOR COHERENCE SCRAMBLING IN METROLOGY APPLICATIONS
METHOD AND APPARATUS FOR COHERENCE SCRAMBLING IN METROLOGY APPLICATIONS
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机译:计量应用中的连贯性扰扰的方法和装置
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摘要
Disclosed is a pupil shaping arrangement for obtaining a defined pupil intensity profile for a metrology illumination beam configured for use in a metrology application. The pupil shaping arrangement comprises an engineered diffuser (ED) having a defined far-field profile configured to impose said defined pupil intensity profile on said metrology illumination beam. The pupil shaping arrangement may further comprise a multimode fiber (MMF) and be configured to reduce spatial coherence of coherent radiation.
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