Guidance system for high load and multi stage, large stroke and high precision moving stage system

摘要

To provide a large load-bearing guide mechanism and a multi-degree of freedom, large-stroke, high-precision motion stage system.SOLUTION: The guide mechanism comprises: a rigid frame for achieving a large-stroke displacement and high-speed motion; a core motion stage connected to a motion portion of a non-contact actuator and connected to the rigid frame by a flexible hinge unit, and generating a precision displacement of a small stroke by the elastic deformation of the flexible hinge unit by the drive of an actuator; a main flexible hinge unit provided between both sides of the core motion stage and the rigid frame, supporting a core stage, and causing the core motion stage to generate precise displacement by the moving direction deformation; and a sub-flexible hinge unit provided between another both sides of the core motion stage and the rigid frame, used for improving the torsional deformation resistance of the core motion stage, permitting the displacement of the moving direction of the core motion stage, and vertically arranged in the main flexible hinge unit.SELECTED DRAWING: Figure 1