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Silicon nitride-carbon nanotube-graphene nanocomposite microbolometer IR detector
Silicon nitride-carbon nanotube-graphene nanocomposite microbolometer IR detector
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机译:氮化硅 - 碳纳米管 - 石墨烯纳米复合材料微增压仪红外探测器
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摘要
The present disclosure is an infrared sensor capable of being integrated into a IR focal plane array. It includes of a CMOS based readout circuit with preamplification, noise filtering, and row/column address control. Using either a microbolometer device structure with either a thermal sensing element of vanadium oxide or amorphous silicon, a nanocomposite is fabricated on top of either of these materials comprising aligned or unaligned carbon nanotube films with IR transmissive layer of silicon nitride followed by one to five monolayers of graphene. These layers are connected in series minimizing the noise sources and enhancing the NEDT of each film. The resulting IR sensor is capable of NEDT of less than 1 mK. The wavelength response is from 2 to 12 microns. The approach is low cost using a process that takes advantage of the economies of scale of wafer level CMOS.
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