DIAMOND SINGLE WIRE ELECTRIC SPARK COMPOSITE MACHINING METHOD AND DEVICE

摘要

A diamond single wire electric spark composite machining device, comprising a wire roller drive motor (1); one end of the wire roller drive motor is provided with a wire roller (2), the front end of the wire roller is provided with a pulse power supply (3), the lower end of the wire roller is provided with a cutting head frame (4), the outer surface of the wire roller is provided with a diamond wire (5), the lower end of the cutting head frame is provided with a silicon rod (6), and the lower end of the silicon rod (6) is provided with rod holders (11). Further disclosed is a diamond single wire electric spark composite machining method. By means of providing the pulse power supply, a positive lead wire (13), a negative lead wire (14), and an electric brush (12), traditional electric spark machining and diamond wire cutting techniques are combined to implement electric spark diamond wire composite machining on semiconductor crystalline silicon. On the basis of diamond wire single wire cutting, electric discharge machining is added to improve the machined surface. In addition, pits on the machined surface produced by electric spark machining are beneficial in reducing the work intensity of a subsequent texturing process.