Work surface defect detection device and detection method, work surface inspection system and program

摘要

PROBLEM TO BE SOLVED: To provide a surface defect detecting device or the like of a work capable of stably detecting a small surface defect with high accuracy. SOLUTION: A plurality of images of a part to be measured of a work are acquired and a temporary defect candidate is extracted in a state where a light / dark pattern by a lighting device is relatively moved with respect to a work which is a surface defect detection target. If the number of images including the provisional defect candidate exists in or more than a preset threshold value among the plurality of images from which the provisional defect candidate has been extracted, the provisional defect candidate is determined as the defect candidate. A composite image is created by synthesizing a plurality of images including the determined defect candidates, and defect detection is performed based on the created composite image. [Selection diagram] Fig. 6