Particle beam typewriter and particle beam typewriter

摘要

Drift correction is performed with high accuracy while the amount of calculations is reduced. According to one aspect of the present invention, a charged particle beam recorder includes a discharge device, a discharge device emitting a charged particle beam, a deflector adjusting an irradiation position of the charged particle beam with respect to a substrate placed on a stage, a shooting data generator, the shooting data is generated from writing data, with the shooting data comprising a shot size, a shot position and a beam-ONE/AUS time per shot, a drift correction,the reference refers to a multitude of parts of the firing data for each predetermined area irradiated with the charged particle beam or for each predetermined number of shots of the irradiated, charged particle beam, calculate an operating amount of the irradiation position of the charged particle beam with which the substrate irradiated, based on the size of the shot, the position of the shot and the beam-ONE/AUS time, and producing corrective information to correct a radiation position offset, based on the drift amount, and a deflection control, which is a deflection amount obtained by the deflector,based on the shooting data and the correction information.