Measurement apparatus for micro- and nano-scale material and measurement method thereof

摘要

A measurement apparatus for micro- and nano-scale materials and a measurement method thereof are provided. The measurement apparatus for the micro- and nano-scale material includes a transmission electron microscope to generate a magnetic field, and a conductive flat punch and a sample which are arranged in the magnetic field. The sample includes the micro- and nano-scale materials. When the current passes through the sample and the conductive flat punch, the conductive flat punch deflects laterally relative to the sample with controllable displacement driven by the electromagnetic force. The required lateral displacement of the present invention is controllable, so that the utilization rate of equipment is greatly increased, and the cost is reduced. In addition, the whole test is performed in the transmission electron microscope, so that a measurement process can be observed in real time.