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IMPURITY DIFFUSION COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT USING SAME, AND METHOD FOR MANUFACTURING SOLAR CELL
IMPURITY DIFFUSION COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT USING SAME, AND METHOD FOR MANUFACTURING SOLAR CELL
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机译:杂质扩散组合物,使用该杂质扩散组合物,制造半导体元件的方法,以及制造太阳能电池的方法
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摘要
The purpose of the present invention is to provide an impurity diffusion composition that allows uniform impurity diffusion in a semiconductor substrate, and excellent continuous printing capability in screen printing. In order to achieve this purpose, the impurity diffusion composition according to the present invention has the following structure. Specifically, this impurity diffusion composition contains (A) a polyvinyl alcohol, (B) an impurity diffusion component, and (C) a siloxane, wherein the saponification value of the polyvinyl alcohol (A) is not less than 20 mol% but less than 90 mol%, and the siloxane (C) includes a specific moiety structure.
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