DRY VACUUM PUMP APPARATUS, CONTROL METHOD THEREOF AND CONTROL PROGRAM

摘要

A dry vacuum pump device that enables the power device of the inverter to consume the regenerative power generated from the motor side during a power failure, and immediately supplies power from the power source to the inverter after power is restored, and is capable of restarting the vacuum pump immediately after power recovery, and the like. Provides a control method and a control program. A dry vacuum pump 1, a motor 2 that drives the dry vacuum pump 1, and an inverter 11 that controls the rotational speed of the motor 2 by supplying AC power of a variable frequency to the motor 2 Wow, a control device 4 for controlling the inverter 11 is provided, and the control device 4 consumes the regenerative power generated on the motor side in the event of a power failure by the switching element of the inverter 11, Inverter 11 is controlled so as to supply driving power from 11 to motor 2.