Particle beam system and method for current regulation of single particle beams

摘要

A particle beam system comprising: at least one particle source (Q) which is configured to generate a charged particle beam; a first multi-lens array (MLA1) which has a first plurality of individually adjustable and focusing particle lenses and which is arranged in the beam path of the particles in such a way that at least some particles pass through openings of the multi-lens array in the form of several individual particle beams (S1, S2, S3); a second multi-aperture plate (PA2) which has a plurality of second openings and which is arranged in the beam path of the particles after the first multi-lens array (MLA1) and in such a way that particles which pass through the first multi-lens array (MLA1) partially hit the second multi-aperture plate (PA2) and there are absorbed and partially penetrate the openings of the second multi-aperture plate (PA2); anda controller (550) which is set up to supply an individually adjustable voltage to the particle lenses of the first multi-lens array (MLA1) and thus to set the focusing of the associated particle lens individually for each individual particle beam (S1, S2, S3).