Drive circuit of piezoelectric transformer and method for driving piezoelectric transformer

摘要

To provide a drive circuit of a piezoelectric transformer whose drive frequency is adjusted so as to be between a resonance frequency and an antiresonance frequency of the piezoelectric transformer and a method of driving a piezoelectric transformer.SOLUTION: In a plasma generator 1, a drive circuit 2 includes a switch 7, an inductance 8, and a control unit 16. The drive circuit 2 applies a periodically changing voltage, whose period length is set by a drive frequency, to a piezoelectric transformer 3. The control unit 16 adjusts the drive frequency of the applied voltage according to an average current value of a current flowing through the inductance 8.SELECTED DRAWING: Figure 1