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Wafer-level inspection using on-valve inspection detectors
Wafer-level inspection using on-valve inspection detectors
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机译:使用阀门检查探测器的晶圆级检查
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摘要
A system and method for wafer-level inspection using on-valve inspection detectors to detect defects on a semiconductor wafer surfaces during a semiconductor device manufacturing process is disclosed herein. In some exemplary embodiments, a method for wafer-level inspection includes: transporting a semiconductor wafer through a transfer port of a processing chamber; scanning a surface of the semiconductor wafer automatically using at least one on-valve inspection detector arranged on a vacuum valve providing access through the transfer port; generating at least one surface image of the surface of the semiconductor wafer; and analyzing the at least one surface image to detect defects on the surface of the semiconductor wafer.
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