Waveform graphene diaphragm optical fiber FP sound pressure sensor

摘要

PROBLEM TO BE SOLVED: To provide a waveform graphene diaphragm optical fiber FP sound pressure sensor having a simple structure, easy to manufacture, and improved sensitivity. A corrugated graphene diaphragm optical fiber FP sound pressure sensor including a single-mode optical fiber 1, an optical fiber stub 2, and a corrugated graphene diaphragm 3 uses a corrugated graphene diaphragm as a pressure-sensitive unit and transmits a laser via a single-mode optical fiber. At the same time, high-sensitivity detection for deflection deformation of the diaphragm is achieved by the optical fiber FP interference principle. The corrugated graphene diaphragm has a corrugated structure and can effectively improve the diaphragm pressure-deflection characteristic by releasing the internal stress of the diaphragm. The sound pressure sensor of the present invention has merits such as simple structure, small volume, high sensitivity, and resistance to electromagnetic interference, and has significant research significance in the field of sound wave detection such as aerospace, noise measurement, and voice dialogue. , Very useful. [Selection diagram] Fig. 1