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Using modeling for identifying a location of a fault in an RF transmission system for a plasma system
Using modeling for identifying a location of a fault in an RF transmission system for a plasma system
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机译:使用建模识别用于等离子体系统的RF传输系统中的故障位置
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摘要
Systems and methods for identifying a location of a fault in an RF transmission system includes characterizing the RF transmission system and selecting one of the stage in the RF transmission system as an initial selected stage. An output of the initial selected stage can be measured in the characterized RF transmission system. The measured output of the initial selected stage is propagated through a baseline RF model and a point of deflection is identified in a resulting RF model of the RF transmission system.
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