FORCE MEASURING DISC AND DEVICE FOR DETERMINING FORCES IN THE PICONEWTON TO NANONEWTON RANGE

摘要

The invention relates to a force measuring disc having a planar regular arrangement of force measuring cells, wherein a force measuring cell is formed in a hole in the force measuring disc, in which hole precisely one planar element which is secured by springs in a self-supporting fashion is arranged and is oriented so as to run parallel to the force measuring disc, wherein each spring is connected in a materially joined fashion at a first end to the edge of a hole and at a second end to the edge of a planar element, wherein a. the force measuring disc, the springs and the planar elements are formed from the same material, b. the springs are embodied as elongate meandering structures with more than two meandering periods, and c. each planar element is surrounded by four springs arranged in a rotationally symmetrical fashion, and d. each planar element can be elastically deflected in three spatial directions under the effect of a force, wherein there is a linear relationship between the deflection and the force. In addition, the invention relates to a device for determining forces in the piconewton to nanonewton ranges.