Baking jig

摘要

The firing jig comprises a SiC or Si SiC substrate and a coating layer covering the surface of the substrate.The coating layer comprises a first layer of al. Sub.2 o.sub.3-sio. Sub.2 formed mainly on the substrate surface and a second layer exposed to the surface of the coating layer.The second layer consists of at least one selected from Y2O3, HfO2, CeO2, NiO, WC, Ni and Mo for electronic components, and at least one selected from Y2O3, HfO2, CeO2 and NiO for active material of lithium battery Minutes.