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CHIP WIRING LAYER TEMPERATURE SENSING CIRCUIT, TEMPERATURE SENSING METHOD AND CHIP THEREOF
CHIP WIRING LAYER TEMPERATURE SENSING CIRCUIT, TEMPERATURE SENSING METHOD AND CHIP THEREOF
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机译:芯片布线层温度传感电路,温度传感方法及芯片
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摘要
This invention discloses a chip wiring layer temperature sensing circuit, a temperature sensing method, a chip stereo temperature sensor, and a chip thereof. The chip wiring layer temperature sensing circuit includes a metal wiring layer temperature detection module, a pulse delay detection module, and a temperature transition module; wherein the metal wiring layer temperature detection module is disposed at a metal interconnection structure of a metal wiring layer of a chip; and the metal interconnection structure is electrically connected to the pulse delay detection module; wherein the pulse delay detection module includes a system high-speed clock, a delay data generated after a pulse passing through the metal wiring layer temperature detection module detected by the system high-speed clock, and the delay data was sent to the temperature transition module; wherein the temperature transition module calculates a temperature of the metal wiring layer according to the delay data.
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