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TRIANGULATION SENSING SYSTEM AND METHOD WITH TRIANGULATION LIGHT EXTENDED FOCUS RANGE USING VARIABLE FOCUS LENS
TRIANGULATION SENSING SYSTEM AND METHOD WITH TRIANGULATION LIGHT EXTENDED FOCUS RANGE USING VARIABLE FOCUS LENS
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机译:三角测量传感系统与三角测量光扩展聚焦范围的方法使用可变聚焦镜头
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摘要
A triangulation sensing system includes a projection axis configuration and an imaging axis configuration. The projection axis configuration includes a triangulation light source (e.g. an incoherent source) and a variable focus lens (VFL) that is controlled to rapidly periodically modulate a triangulation light focus position (TLFP) along a Z axis over a focus position scan range, to provide a corresponding triangulation light extended focus range (TLEFR) that supports accurate measurement throughout. In some implementations, the triangulation system may be configured to provide the best measurement accuracy for a workpiece region of interest (WROI) by exposing its triangulation image only when the scanned TLFP temporarily coincides with the WROI Z height. In some implementations, the triangulation system may be configured to limit various measurement operations to using only an operational pixel subset of a detector that receives image light from the WROI, in order to shorten the measurement time.
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