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Rotary friction welded blank for PECVD heated showerhead
Rotary friction welded blank for PECVD heated showerhead
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机译:PECVD加热淋浴头的旋转摩擦焊接坯料
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摘要
A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
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