首页>
外国专利>
Apparatus for wavelength resolved angular resolved cathodoluminescence
Apparatus for wavelength resolved angular resolved cathodoluminescence
展开▼
机译:用于波长分辨的角度分辨阴极发光的装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.
展开▼