ION BEAM IRRADIATION SYSTEM, ION BEAM PURITY MEASUREMENT METHOD, ION BEAM PURITY MEASUREMENT DEVICE, AND ION BEAM PURITY MEASUREMENT PROGRAM

摘要

This ion beam irradiation system 1, which comprises an ion source 2 that extracts ions, a linear accelerator 4 and a circular accelerator 5 that accelerate the ions to generate an ion beam, an irradiation device 8 that performs irradiation with the ion beam accelerated by the accelerator, and a control device 10 that controls the accelerator and the irradiation device, comprises: a dose detection device 13 that detects the dose of the ion beam accelerated by the accelerator; a current detection device 14 that detects a current of the ion beam that has passed through the dose detection device; and a measurement processing unit 31 that measures the purity of the ion beam on the basis of a dose detection value of the dose detection device and a current detection value of the current detection device. Accordingly, impurity ions having the same mass-to-charge ratio as a target ion type in the irradiation with the ion beam can be detected.