Devices and methods for determining the properties of surface and subsurface structures

摘要

PROBLEM TO BE SOLVED: To provide a 3D super-resolution imaging system and method for determining surface topography and / or subsurface structure. An apparatus for determining a four-dimensional characteristic of an interface 100 of an object, wherein a light source 102, a means for forming a photonic jet used for imaging the interface 100, and a means 105b for performing wide-field interference imaging. A means 108 for passing light close to the interface 100 and guiding the light to the interface is provided, the means 108 forming an image and combining the phase shift interference imaging means 106 at the interface 100 with optical interference and a photonic jet. The imaging means 110 that receives light from the interface 100 modulated by the microsphere 108 that forms super-resolution image information, and the processor device 112 that determines the four-dimensional characteristics of the interface 100 by utilizing the influence of the photonic jet. Consists of. [Selection diagram] Fig. 1