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SUPPRESSION OF TRANSVERSE MODE SPURIOUS SIGNALS IN SURFACE ACOUSTIC WAVE DEVICES UTILIZING A DENSE FILM ABOVE GAP REGION OF INTERDIGITAL TRANSDUCER ELECTRODES
SUPPRESSION OF TRANSVERSE MODE SPURIOUS SIGNALS IN SURFACE ACOUSTIC WAVE DEVICES UTILIZING A DENSE FILM ABOVE GAP REGION OF INTERDIGITAL TRANSDUCER ELECTRODES
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机译:抑制在叉指式换能器电极的间隙区域上方的致密膜的表面声波器件中的横向模式虚假信号
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摘要
An acoustic wave device comprises a substrate including a piezoelectric material, interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes having gap regions, edge regions, and center regions, a first dielectric film having a lower surface disposed on the IDT electrodes and the surface of the substrate, and a material having a density greater than a density of the first dielectric film disposed above the gap regions of the IDT electrodes.
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