首页>
外国专利>
RECIPE SELECTION BASED ON INTER-RECIPE CONSISTENCY
RECIPE SELECTION BASED ON INTER-RECIPE CONSISTENCY
展开▼
机译:基于配方间稠度的配方选择
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method including: determining recipe consistencies between one substrate measurement recipe of a plurality of substrate measurement recipes and each other substrate measurement recipe of the plurality of substrate measurement recipes; calculating a function of the recipe consistencies; eliminating the one substrate measurement recipe from the plurality of substrate measurement recipes if the function meets a criterion; and reiterating the determining, calculating and eliminating until a termination condition is met. Also disclosed herein is a substrate measurement apparatus, including a storage configured to store a plurality of substrate measurement recipes, and a processor configured to select one or more substrate measurement recipes from the plurality of substrate measurement recipes based on recipe consistencies among the plurality of substrate measurement recipes.
展开▼