A method for examining objects in korpuskular beam apparatus

• 1. 物体检查装置、物体检查系统以及调整检查位置的方法 [P] . 中国专利： CN110712194A . 2020-01-21
• 2. 用于对物体进行光学检查的检查设备和物体检查装置 [P] . 中国专利： CN110537075A . 2019-12-03
• 3. Arrangement for the displacement of a in a korpuskular beam apparatus of the object to be examined in the beam direction, in particular for electron microscopes cartridge [P] . 德国专利： DE756934C . 1952-12-15

  机译： 尤其是对于电子显微镜盒，在待检查物体的桶形束设备中沿射线方向位移的布置

• 4. Arrangement for adjusting the permissible load as well as for the purpose of reducing the load of objects, which in korpuskular beam apparatus be examined. [P] . 德国专利： DE902533C . 1954-01-25

  机译： 用于调节允许的载荷以及为了减小物体的载荷的布置的装置，该物体在膝状梁装置中被检查。

• 5. For examining objects, which is connected to a vacuum pump korpuskular beam apparatus, in particular an electron microscope [P] . 德国专利： DE760949C . 1954-10-11

  机译： 用于检查物体，该物体连接到真空泵的管状射束设备，特别是电子显微镜

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