Diffusion furnace and method utilizing high speed recovery

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• 2. 利用极低质量运送系统的扩散炉及晶圆快速扩散加工处理的方法 [P] . 中国专利： CN102356458A . 2012-02-15
• 3. Diffusion furnace utilizing high speed recovery [P] . 美国专利： US3311694A . 1967-03-28

  机译： 利用高速回收的扩散炉

• 4. Diffusion furnace with high speed recovery [P] . 美国专利： US3385921A . 1968-05-28

  机译： 高速回收扩散炉

• 5. BLAST FURNACE SLAG GRANULATION AND WASTE HEAT RECOVERY AND UTILIZATION DEVICE AND METHOD [P] . WO2021169589A1 . 2021-09-02

  机译： 高炉炉渣造粒和废热回收和利用装置和方法

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