Electromechanical resonator device - contg piezoelectric plate with transducer and resonator zones

摘要

Monolithic resonator device consisting of a piezoelectric plate (pref. quartz) having thinner and thicker zones, the latter situated on both ends of the plates being provided on both sides with electrodes and serving as inlet outlet transducers and the electrodeless intermediate thicker zone(s) serving as resonator(s), is produced by forming a metallic coating on the surface of the future transducer and resonator zones; etching the intervening exposed zones to the required depth; and removing the metallic coating from the resonator zones. The etching is more accurate than mechanical working. High quality factor and good stability are achieved. The device is suitable for use in electromechanical filters having own resonance in the MHz-ringe.