optical device for the spectrometrie electronic ion diffusion and secondary ion mass spectrometrie

摘要

1445963 Ion beam apparatus MAX-PLANCKGES ZUR FÍRDERUNG DER WISSENSCHAFTEN EV 19 March 1975 [25 March 1974] 11370/75 Heading HID Ion beam apparatus for surface analysis of a specimen 16 which permits as alternative modes ion scattering spectrometry or secondary ion mass spectrometry comprises a primary ion beam source 10 bombarding the specimen 16, the scattered or ejected ions passing in turn through an energy analyser 24 and a mass spectrometer 32 to an ion detector 36. The mass spectrometer is not used in ion scattering spectrometry where energy analysis only is required. In secondary ion mass spectrometry the energy analyser 24 is set to transmit the central energy level of the secondary ions, mass analysis then taking place in the mass spectrometer 32 which is preferably a quadrupole filter. The energy analyser can be a concentric cylinder or sphere capacitor. Earthed beam defining apertures are indicated at 10a, 18, 20, 26 and 30 with an electrostatic lens 14. The electrode assembly 22 accelerates the ions from the sample 16. Electrode 28 decelerates the ions before entry to spectrometer 32.