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method for the diffuse of dote - ringsmateriaal in a semiconductor boules.
method for the diffuse of dote - ringsmateriaal in a semiconductor boules.
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机译:半导体圆环中的点-环材料扩散的方法。
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摘要
A nitride semiconductor crystal is heated in an ammonia atmosphere and exposed to vaporized acceptor impurities to introduce the impurities into the crystal.
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