Thermo-chemical cracking of nitric oxides - to form non-toxic products by combustion with excess of fuel gas

摘要

Nitric oxide contg. waste gases from etching processes are treated by combustion with excess of gaseous fuel after intense mixing. The gas and nitric oxide are mixed in a vortex chamber and the mixture flows up a further mixing pipe to a burner. This has a stage-wise increase in dia. and discharges into a reaction chamber. Waste heater recovery is possible on larger units.