首页>
外国专利>
SCANNING CHARGED PARTICLE MICROPROBE WITH EXTERNAL SPURIOUS ELECTRIC FIELD EFFECT CORRECTION
SCANNING CHARGED PARTICLE MICROPROBE WITH EXTERNAL SPURIOUS ELECTRIC FIELD EFFECT CORRECTION
展开▼
机译:带有外部电场效应校正的扫描带电粒子微探针
展开▼
页面导航
摘要
著录项
相似文献
摘要
This invention relates to a scanning charged-particle microscope system, such as a scanning electron microscope system. More particularly, the invention relates to apparatus that is used in compensating for external interference with the charged particle beam.
展开▼