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DIFFUSION OF IMPURITY INTO SEMICONDUCTOR WAFER FROM SOLID IMPURITY DIF FUSION SOURCE
DIFFUSION OF IMPURITY INTO SEMICONDUCTOR WAFER FROM SOLID IMPURITY DIF FUSION SOURCE
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机译:固体杂质DIF融合源将杂质扩散到半导体晶片中
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摘要
PURPOSE:Moisture absorption of the boron glass layer deposited on scmiconductor wafers us orevented and diffusion is made even by performing second heat treatment on the semiconductor wafers alone after first deposition.
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