Secondary-ion mass spectroscopy and residual gas analysis appts. - having electrostatic lens system with cylindrical section(s) which also acts as ion emitting electrode

摘要

Appts. suitable for carrying out secondary ion mass spectroscopy and residual gas analysis, includes an electrostatic lens system with at least one cylindrical section up stream of a mass filter. The cylindrical section is in the form of an electrode which can act as an ion source. Pref. the electrostatic lens system includes several cylindrical section sand that the section immediately upstream of the mass filter is in the form of an electrode for the ion source. The same appts. with all attached auxiliaries can be used for residual gas analysis and the cost of separate appts. for this purpose is saved.